Product
SHG Technology는 높은 확장성을 바탕으로 다양한 소재와 공정에 적용할 수 있습니다.
Harmonic® G Series
Wafer Metrology System
- Patterned and blanket wafers
- High throughput in-line system
- Optical non-destructive technique
- No sample prep, consumables or reagents
- ISO Class 1 cleanroom mini-environment
- 200 mm or 300 mm configurable
- Dual load port EFEM
- Bay and Chase or Ballroom compatible
